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PCI-AM

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Quartz PCI-AM is AI-driven automated metrology software for measuring semiconductor device features in SEM and TEM images, including both cross-section (X-SEM) and top-view geometries. Built on more than 30 years of Quartz Imaging's work in semiconductor metrology, PCI-AM is designed specifically for semiconductor failure analysis, process development, and engineering labs; it has no medical or pathology application. PCI-AM operates as an add-on module to Quartz PCI and provides four levels of automation. At the simplest level, a single click inside a device feature triggers measurement according to a pre-configured recipe. The second level extends single-click measurement across a series of images, automatically compensating for misalignment between them. The third level, template matching, lets users design a custom feature template in a graphical editor; PCI-AM then uses machine learning to locate, align, and measure every instance of that template across an image set with no manual intervention. The fourth level runs this process in full batch mode across an entire folder of images, sorting results into Pass, Fail, and Reject folders automatically. Measurement types include trench and pillar dimensions (CD width, sidewall angle, radius of curvature, line edge and line width roughness), multi-point macro cell measurements, and shape analysis (area, perimeter, aspect ratio, ideal shape deviation). Results populate a measurement grid and export directly to CSV for downstream analysis, and integrate into PCI's report editor for image-plus-data reporting. The stated benefit set centers on time savings and measurement consistency: removing subjective, user-to-user variation in manual edge detection and replacing it with a repeatable, automated process. The current release is PCI-AM Version 9.

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